US EPA

1379358 

Technical Report 

Semiconductor Industry Study 

Wade, R; Williams, M; Mitchell, T; Wong, J; Tuse, B; Ciofalo, FR; Rosenberg, J 

1981 

NIOSH/00179312 

Division of Occupational Safety and Health 

A report was presented assessing occupational health hazards within the semiconductor industry in the Santa Clara and San Mateo County areas of California ("Silicon Valley"). Results of a preliminary survey to approximately 60 manufacturers were presented in detail. From the preliminary questionnaire, 13 manufacturers were selected for in depth evaluations of all aspects of industrial hygiene. The basic manufacturing processes were for silicon ingots and wafers, integrated circuits and discrete silicon (7440213) devices, gallium-arsenide (1303000) (GaAs) light emitting diodes (LEDs) and microwave integrated circuits, and liquid crystal displays. These processes were described and results of the detailed survey were presented. Results of breathing zone, area, wipe, and material sampling were provided in three extensive tables. A section on toxicology defined the general routes of worker exposure to industrial chemicals and general mechanisms of toxic reactions, with chemicals associated with the semiconductor industry as examples. Seven tables of chemicals used in the industry and their toxic effects were provided. A detailed summary of employee exposure and control variables and a set of recommendations and conclusions was provided. The authors conclude that health hazards appear to be generally well controlled, except for inorganic arsenic exposure during GaAs LED production. However, they also conclude that there is potential for acute exposures to hazardous chemical and physical agents due to equipment malfunctions and a lack of an effective preventive exposure control strategy for the numerous potential hazards that can develop. 

DCN-167138; Electronics industry; Occupational exposure; Industrial hazards; Industrial exposures; Industrial health programs; Employee exposure; Occupational health programs; Acute exposure; Chronic exposure; Toxic materials; Health hazards