Atomic Layer Deposition of Li 2 O–Al 2 O 3 Thin Films | Health & Environmental Research Online (HERO)

Health & Environmental Research Online (HERO)

Print Feedback Export to File

This record has one attached file:

HERO ID

905427

Reference Type

Journal Article

Title

Atomic Layer Deposition of Li 2 O–Al 2 O 3 Thin Films

Author(s)

Aaltonen, T; Nilsen, O; Magrasó, A; Fjellvåg, H

Year

2011

Is Peer Reviewed?

Yes

Journal

Chemistry of Materials
ISSN: 0897-4756
EISSN: 1520-5002

Volume

Issue

Page Numbers

4669-4675

DOI

10.1021/cm200899k

Web of Science Id

WOS:000296304100006

URL

Keywords

atomic layer deposition; solid-state electrolyte; thin film battery; lithium aluminum oxide