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HERO ID
905427
Reference Type
Journal Article
Title
Atomic Layer Deposition of Li 2 O–Al 2 O 3 Thin Films
Author(s)
Aaltonen, T; Nilsen, O; Magrasó, A; Fjellvåg, H
Year
2011
Is Peer Reviewed?
Yes
Journal
Chemistry of Materials
ISSN:
0897-4756
EISSN:
1520-5002
Volume
23
Issue
21
Page Numbers
4669-4675
DOI
10.1021/cm200899k
Web of Science Id
WOS:000296304100006
URL
http://pubs.acs.org/doi/abs/10.1021/cm200899k
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Keywords
atomic layer deposition; solid-state electrolyte; thin film battery; lithium aluminum oxide
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