Advances in fabrication of X-ray masks based on vitreous carbon using a new UV sensitive positive resist - art. no. 679214 | Health & Environmental Research Online (HERO)

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HERO ID

1278704

Reference Type

Book/Book Chapter

Title

Advances in fabrication of X-ray masks based on vitreous carbon using a new UV sensitive positive resist - art. no. 679214

Author(s)

Voigt, A; Kouba, J; Heinrich, M; Gruetzner, G; Scheunemann, HU; Rudolph, I; Waberski, C

Year

2008

Book Title

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)

Volume

6792

Page Numbers

79214-79214

Keywords

UV sensitive photoresist; chemically amplified; X-ray mask; LIGA; UDXRL; vitreous carbon; adhesion; side wall striations