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HERO ID
1324808
Reference Type
Journal Article
Title
Uncooled focal plane array detector development at InfraredVision Technology Corporation
Author(s)
Hay, KA; Van Deusen, D
Year
2005
Is Peer Reviewed?
Unk
Journal
Proceedings of SPIE
ISSN:
0277-786X
EISSN:
1996-756X
Book Title
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
Volume
5783
Page Numbers
514-523
DOI
10.1117/12.604218
Web of Science Id
WOS:000230925900054
Abstract
InfraredVision Technology Corporation (""ITC"") has
improved the performance of the 320x240 microbolometer Uncooled Focal Plane Array (""UFPA"") by
increasing the pixel fill-factor. This allows state-of-the-art performance for applications
requiring high sensitivity. Measurements taken on microbolometer test structures and detector
arrays show a factor of two improvements in the responsivity over that previously reported for
our standard 37.5-mu m pixel UFPA. Performance results for microbolometer pixels ranging in size
from 50 mu m down to 15 mu m are presented. Our ITC-1000 series detector product addresses both
imaging and radiometric commercial-camera applications. With the development of a high fill-
factor pixel design, ITC will soon provide a high-performance VOx microbolometer-based sensor to
camera manufacturers requiring state-of-the-art detector performance. FPA performance is
presented to demonstrate the sensor improvements accomplished. The use of our on-chip
NonUniformity Correction (NUC) feature, available on the ITC-1000 detector, is characterized to
demonstrate the performance limitations.
Keywords
UFPA; uncooled; microbolometer; VOx; vanadium oxide; NonUniformity Correction (NUC)
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