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1324917 
Journal Article 
MEMS-Based uncooled infrared bolometer Arrays - A review 
Niklaus, F 
2008 
Unk 
Proceedings of SPIE
ISSN: 0277-786X
EISSN: 1996-756X 
Proceedings of SPIE-The International Society for Optical Engineering 
6836 
WOS:000254509100012 
Uncooled infrared bolometer arrays have become the
technology of choice for low-cost infrared imaging systems used in applications such as
thermography, firefighting, driver night vision, security and surveillance. Uncooled infrared
bolometer arrays are reaching performance levels which previously only were possible with cooled
infrared photon detectors. With a continuously increasing market volume (> 100 000 units per year
to date), the cost for uncooled infrared imaging chips are decreasing accordingly. In this paper
we give an overview of the historical development of uncooled infrared bolometer technology and
present the most important bolometer performance parameters. The different technology concepts,
bolometer design approaches and bolometer materials (including vanadium oxide, amorphous silicon,
silicon diodes, silicon-germanium and metals) are discussed in detail. This is followed by an
analysis of the current state-of-the-art infrared bolometer technologies, the status of the
infrared industry and the latest technology trends. 
uncooled infrared bolometer arrays; microbolometer; MEMS; infrared detector; focal plane array; IR; FPA