The materials challenge in diffraction-unlimited direct-laser-writing optical lithography | Health & Environmental Research Online (HERO)

Health & Environmental Research Online (HERO)

Print Feedback Export to File

This record has one attached file:

HERO ID

1619311

Reference Type

Journal Article

Title

The materials challenge in diffraction-unlimited direct-laser-writing optical lithography

Author(s)

Fischer, J; von Freymann, G; Wegener, M

Year

2010

Is Peer Reviewed?

Yes

Journal

Advanced Materials
ISSN: 0935-9648
EISSN: 1521-4095

Volume

Issue

Page Numbers

3578-3582

Language

English

PMID

20593434

DOI

Web of Science Id

WOS:000281692100013

URL