Health & Environmental Research Online (HERO)


Print Feedback Export to File
1750043 
Journal Article 
Noninterferometric wide-field optical profilometry with nanometer depth resolution 
Lee, CH; Mong, HY; Lin, WC 
2002 
1 
Optics Letters
ISSN: 0146-9592
EISSN: 1539-4794 
27 
20 
1773-1775 
English 
18033359 
Applying the principle of differential confocal microscopy to wide-field optically sectioning microscopy, we develop a noninterferometric optical profilometer without scanning mechanisms. Depth resolution of 2 nm is achieved with a power-regulated tungsten-halogen lamp as the light source and a 14-bit CCD camera as the detector. The effects of inhomogeneous surface reflectivity are removed from topographic measurements by arithmetic division. The whole system can be constructed on a single silicon chip for use as a miniaturized optical profiler.