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1772130 
Journal Article 
Development and application of a diaphragm micro-pump with piezoelectric device 
Ma, HK; Hou, BR; Wu, HY; Lin, CY; Gao, JJ; Kou, MC 
2008 
1 
Microsystem Technologies
ISSN: 0946-7076 
14 
7 
1001-1007 
WOS:000256090900017 
In this study, a new type of thin, compact, and light
weighed diaphragm micro-pump has been successfully developed to actuate liquid by the vibration
of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by
using highly accurate CNC machine, and the cross-section dimension is 28 mm x 5 mm. Both valves
and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device
produces an oscillating flow and alters the chamber volume by the curvature change of a
diaphragm. Several experimental set-ups for performance tests in a single micro-diaphragm pump,
isothermal flow open system, and a closed liquid cooling system are designed and implemented. The
performance of a one-side actuating micro-diaphragm pump is affected by the design of check
valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The
measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of
operation frequency 70-180 Hz.