Grain growth and mechanical properties of CeO2-x films deposited on Si(100) substrates by pulsed dc magnetron sputtering | Health & Environmental Research Online (HERO)

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HERO ID

1869976

Reference Type

Journal Article

Title

Grain growth and mechanical properties of CeO2-x films deposited on Si(100) substrates by pulsed dc magnetron sputtering

Author(s)

Park, InW; Lin, J; Moore, JJ; Khafizov, M; Hurley, D; Manuel, MV; Allen, T

Year

2013

Is Peer Reviewed?

Journal

Surface and Coatings Technology
ISSN: 0257-8972

Volume

217

Page Numbers

34-38

DOI

Web of Science Id

WOS:000315975400004

Keywords

CeO2-x films; Pulsed dc magnetron sputtering; Rapid thermal annealing (RTA); Mechanical properties; Phase transition