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1948853 
Journal Article 
THE THERMODYNAMIC PROPERTIES OF TETRAETHOXYSILANE (TEOS) AND AN INFRARED STUDY OF ITS THERMAL-DECOMPOSITION 
Vandervis, MGM; Cordfunke, EHP; Konings, RJM 
1993 
No 
Journal de Physique IV
ISSN: 1155-4339
EISSN: 1764-7177 
3 
C3 
75-82 
English 
WOS:A1993MC31900010 
A review is given on the determination of the thermodynamic properties of Si(OC2H5)4 (TEOS, tetraethoxysilane). In addition, the thermal decomposition of TEOS has been studied by in-situ IR spectroscopy. The decomposition products in the gas phase in the absence of oxygen are organic fragments (ethanol, ethanal, ethene, methane, carbon monoxide), and in the presence of oxygen water, carbon dioxide, ethanal and methanal. The results are compared with thermodynamic equilibrium calculations and kinetic models.