Health & Environmental Research Online (HERO)


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2585826 
Journal Article 
Micro-patterning layers by flame spray aerosol deposition 
Tricoli, A; Graf, M; Mayer, F; Kuehne, S; Hierlemann, A; Pratsinis, SE 
2008 
546-547 
WOS:000272169500142 
Here we present a CMOS-compatible, two-step method for deposition and in-situ mechanical stabilization of gas sensitive, metal-oxide microlayers on wafer-level. Lace-like highly porous, Pt-doped SnO(2) nanostructured layers are deposited at wafer-level on 69 microsensors. Second, these layers are converted in well-adhered, cauliflower-like structures (figure 1b, inset). The resulting sensor layer performance is characterized using the analytes CO and EtOH on microsensor devices. 
patterning; sintering; nanoparticles; sensors; solid-oxide fuel cells