Jump to main content
US EPA
United States Environmental Protection Agency
Search
Search
Main menu
Environmental Topics
Laws & Regulations
About EPA
Health & Environmental Research Online (HERO)
Contact Us
Print
Feedback
Export to File
Search:
This record has one attached file:
Add More Files
Attach File(s):
Display Name for File*:
Save
Citation
Tags
HERO ID
2595277
Reference Type
Journal Article
Title
Removal of nanoparticles with laser induced plasma
Author(s)
Varghese, I; Peri, MDM; Dunbar, T; Maynard, B; Thomas, DA; Cetinkaya, C
Year
2008
Is Peer Reviewed?
Yes
Journal
Journal of Adhesion Science and Technology
ISSN:
0169-4243
EISSN:
1568-5616
Volume
22
Issue
5-6
Page Numbers
651-674
DOI
10.1163/156856108X305561
Web of Science Id
WOS:000258034000014
Abstract
A review of the recent progress in the understanding of the laser induced plasma (LIP) technique utilized for nanoparticle removal is presented. LIP nanoparticle removal technique has been successfully demonstrated for removal of 10-60 nm polystyrene latex (PSL) particles from silicon substrates. The motivation for LIP technique stems from the requirement for defect-free cleaning of wafers and lithography photomasks in the semiconductor and microelectronic fabrication industries as well as nanotechnology. The principle of LIP nanoparticle removal technique and progress in its applications as well as the LIP blast wave propagation are reviewed. In recent computational studies, the effects of the two consequences of LIP application, namely, radiation heating from the plasma core and the LIP shockwave thermo-mechanical (pressure and temperature) loading on the substrate and subsequent potential damage are investigated. Removal thresholds for polystyrene latex (PSL) nanoparticles from chromium (Cr) nanofilms using the LIP technique in air are reported. Rolling resistance moment as a particle removal mechanism is discussed and the main results and its implications in nanoparticle removal are summarized. For removal of smaller particles, pressure amplification techniques are employed to replace the in-air LIP. To achieve this purpose, shock tubes in air, wet-LIP and shock tubes submerged in water were investigated for obtaining maximized pressure levels. It is reported that the shockwave pressure can be substantially increased so that submerged shock tubes can generate pressure levels sufficient to remove particles as small as sub-10 nm. (C) Koninklijke Brill NV, Leiden, 2008.
Keywords
laser induced plasma; nanoparticle removal; shockwaves; radiation intensity heating; pressure amplification; shock tubes; wet-LIP; submerged shock tubes
Home
Learn about HERO
Using HERO
Search HERO
Projects in HERO
Risk Assessment
Transparency & Integrity