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2660745 
Journal Article 
Wear of silicon surfaces in MEMS 
Ku, ISY; Reddyhoff, T; Holmes, AS; Spikes, HA 
2011 
1 
Wear
ISSN: 0043-1648
EISSN: 1873-2577 
271 
7-8 
1050-1058 
WOS:000293322000005 
High levels of friction and wear are problems which currently limit the development of sliding micro-electro-mechanical systems (MEMS) - devices which would otherwise offer significant technological advancement. The current paper focuses on the wear of MEMS silicon surfaces, and specifically looks at the effect of environment and surface preparation on wear behaviour. Included in the study is the assessment of two self-replenishing lubrication mechanisms; namely liquid and vapour phase lubrication. All tests were carried out using a tribometer which operated and measured friction and wear under conditions representative of MEMS.



It is shown that friction and wear behaviour depend strongly on subtle changes of the silicon surfaces prior to testing. Greatest wear was measured when the surfaces were tested immediately after plasma-cleaning, while subsequent exposure to ambient air for 15 h reduced wear to negligible levels. Exposure of plasma-cleaned surfaces to water-saturated argon prior to testing prevented wear to a limited extent. Based on this, and TOF-SIMS analysis, it is suggested that the observed wear reduction after exposure to air is caused by tiny amounts of lubricious long chain hydrocarbon contaminants present in ambient air.



Tests carried out with the specimens submerged in a liquid bath show that the presence of liquid water reduces friction and wear, but only if specimens have been plasma-cleaned beforehand. This behaviour is tentatively attributed to the hydrophilic nature of plasma treated silicon, reducing the corrosive action of water. When hexadecane or 1-pentanol was used as a liquid lubricant, friction was minimal, and wear was undetectable under all sliding conditions. This was the case even though the contact operated in the mixed lubrication regime, suggesting a boundary film is formed on the silicon surfaces by both of these organic liquids.



Results of tests carried out with the lubricant being supplied in the form of pentanol vapour also showed no appreciable wear. A considerable difference in friction was found between liquid and vapour lubricated contacts; under the conditions tested, the coefficient of friction for vapour was 0.28, while for liquid it was 0.05. (C) 2011 Elsevier B.V. All rights reserved. 
Micro-electro-mechanical systems; MEMS; Silicon; Liquid lubrication; Vapour lubrication; Friction