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HERO ID
3041565
Reference Type
Journal Article
Title
Glove Permeation by Propylene Glycol Monomethyl Ether Acetate A Photoresist Solvent Used in Semiconductor Device Processing
Author(s)
Zellers, ET; Sulewski, R
Year
1992
Is Peer Reviewed?
Yes
Journal
Applied Occupational and Environmental Hygiene
ISSN:
1047-322X
EISSN:
1521-0898
Report Number
NIOSH/00208488
Volume
7
Issue
6
Page Numbers
392-397
Abstract
A study was made of the permeation of propylene-glycol-monomethyl-ether-acetate (84540578) (PGMEA) through various gloves commonly used in semiconductor fabrication facilities. Permeation tests were performed using a 5.1 centimeter diameter test cell in an open loop configuration with nitrogen as the collection medium. Gloves tested included North B-161 (butyl rubber), Edmont Nytek 49-155 (nitrile rubber), Pioneer Trionic (natural/nitrile/neoprene blend), Playtex 827 (natural/neoprene blend), and Edmont Puretek 30-139 (natural rubber). The butyl rubber gloves provided the highest level of resistance of PGMEA with no breakthrough being observed over the 4 hour test period. Nitrile rubber gloves provided excellent permeation resistance as well with a break through time of 147 minutes. Gloves composed of natural rubber and blends of natural rubber with other polymers provided much shorter breakthrough times. Of all the gloves tested the North Model B-161 butyl rubber glove provided the best protection against PGMEA.
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