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4574332 
Journal Article 
High-Mobility InSe Transistors: The Role of Surface Oxides 
Ho, PH; Chang, YR; Chu, YC; Li, MK; Tsai, CA; Wang, WH; Ho, CH; Chen, CW; Chiu, PW 
2017 
1 
ACS Nano
ISSN: 1936-0851
EISSN: 1936-086X 
11 
7 
7362-7370 
English 
28661128 
WOS:000406649700085 
In search of high-performance field-effect transistors (FETs) made of atomic thin semiconductors, indium selenide (InSe) has held great promise because of its high intrinsic mobility and moderate electronic band gap (1.26 eV). Yet the performance of InSe FETs is decisively determined by the surface oxidation of InSe taking place spontaneously in ambient conditions, setting up a mobility ceiling and causing an uncontrollable current hysteresis. Encapsulation by hexagonal boron nitride (h-BN) has been currently used to cope with this deterioration. Here, we provide insights into the role of surface oxides played in device performance and introduce a dry-oxidation process that forms a dense capping layer on top, where InSe FETs exhibit a record-high two-probe mobility of 423 cm2/V·s at room temperature and 1006 cm2/V·s at liquid nitrogen temperature without the use of h-BN encapsulation or high-κ dielectric screening. Ultrahigh on/off current ratio of >108 and current density of 365 μA/μm can be readily achieved without elaborate engineering of drain/source contacts or gating technique. Thickness-dependent device properties are also studied, with optimized performance shown in FETs comprising of 13 nm thick InSe. The high performance of InSe FETs with ultrathin dry oxide is attributed to the effective unpinning of the Fermi level at the metal contacts, resulting in a low Schottky barrier height of 40 meV in an optimized channel thickness.