US EPA

4700282 

Journal Article 

Morphological and thickness analysis for PMMA spin coated films 

Mohajerani, E; Farajollahi, F; Mahzoon, R; Baghery, S 

2007 

Yes 

Journal of Optoelectronics and Advanced Materials
ISSN: 1454-4164 

9 

12 

3901-3906 

WOS:000251768700041 

The present study shows the application of spin coating method in coating a thin layer of PMMA (Poly (methyl methacrylate)) from its solution in 1,2 Dichloroethane. The dependence of the polymeric film thickness In on concentration of polymer in the solvent c and the angular velocity omega is obtained experimentally ash = 3.2c(1.66) omega (-0.53)). The reason of changes in the constant coefficients in different equations is distinct by comparing them with different solvents. This comparison shows that these constant coefficients in above equation depend on solvent type and the vaporization of solvent. The relationship between viscosity and concentration has been investigated and defined that viscosity can indirectly cause increasing the exponent of concentration or directly entered in equation without influencing in exponent of concentration that both of them cause the same result. Finally the surface morphology is related to the effective parameters in thickness and their effects on surface uniformity are discussed. It is shown that the factors which cause an increase in thickness may reduce the surface quality which limits the thickness of the layer produced by this method. Therefore, for a desired thickness, attention should be paid to the influence of different parameters on the surface uniformity; and optimum values should be chosen for controlling both thickness and surface morphology. 

PMMA (poly (methyl methacrylate)); 1,2 dichloroethane; morphology; spin coating; viscosity; film thickness