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5381112 
Journal Article 
Selective low-power plasma decomposition of silane-methane mixtures for the preparation of methylated amorphous silicon 
Solomon, I; Schmidt, I; Tran-Quoc, I 
1988 
1 
Physical Review B (Condensed Matter)
ISSN: 0163-1829
EISSN: 1095-3795 
38 
14 
9895-9901 
English 
9945813