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5521078 
Journal Article 
Single-chip CMOS optical microspectrometer 
Correia, JH; de Graaf, G; Kong, SH; Bartek, M; Wolffenbuttel, RF 
2000 
1 
Sensors and Actuators A: Physical
ISSN: 0924-4247
EISSN: 1873-3069 
82 
1-3 
191-197 
WOS:000087063700028 
Numerous applications, e.g., systems for chemical analysis by optical absorption and emission line characterization, will benefit from the availability of low-cost single-chip spectrometers. A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry–Perot etalons (each one with different resonance cavity length), photodetectors and circuits for read-out, multiplexing and driving a serial bus interface has been fabricated. The result is a chip that can operate using only four external connections (including Vdd and Vss) covering the visible spectral range of the spectrum with FWHM=18 nm. Frequency output and serial bus interface allow easy multi-sensor, multi-chip interfacing using a microcontroller or a personal computer. Power consumption is 1250 μW for a clock frequency of 1 MHz. 
on-chip optical microspectrometer; microinterferometer; Fabry-Perot etalon; light-to-frequency converter; internal/external bus interface