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5851353 
Journal Article 
Fabry-Perot etalons for x-rays: Construction and characterization 
Lepetre, Y; Rivoira, R; Philip, R; Rasigni, G 
1984 
1 
Optics Communications
ISSN: 0030-4018
EISSN: 1873-0310 
51 
3 
127-130 
A solid Fabry-Perot etalon (FPE) for X-rays has been constructed using sputtering technique. This FPE is made up of two layered synthetic microstructures (LSM's) separated by a carbon spacer. Each LSM consists of fifteen pairs of tungsten/ carbon having a mean period d = 27 Å and deposited onto (111) orientation silicon single crystal substrate. The carbon spacer thickness is 470 Å. The FPE has been characterized by new processes, namely electron microscopy and transmission electron diffraction pattern. The results obtained are in good agreement with those provided by reflectivity measurements using Cu Kα (1.5418 Å) radiation. Another FPE made of two different LSM's has been constructed. The effect of such an asymmetry is investigated.