Synthesis of single crystal diamond by microwave plasma assisted chemical vapor deposition with in situ low-coherence interferometric control of growth rate | Health & Environmental Research Online (HERO)

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Citation
Tags

HERO ID

6090379

Reference Type

Journal Article

Title

Synthesis of single crystal diamond by microwave plasma assisted chemical vapor deposition with in situ low-coherence interferometric control of growth rate

Author(s)

Bushuev, EV; Yurov, VYu; Bolshakov, AP; Ralchenko, VG; Ashkinazi, EE; Ryabova, AV; Antonova, IA; Volkov, PV; Goryunov, AV; Luk'yanov, AYu

Year

2016

Is Peer Reviewed?

Yes

Journal

Diamond and Related Materials
ISSN: 0925-9635

Publisher

Elsevier

Volume

Issue

Elsevier

Page Numbers

83-89

DOI

10.1016/j.diamond.2016.03.023

Web of Science Id

WOS:000379633000011

URL

https://linkinghub.elsevier.com/retrieve/pii/S0925963516300954
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Keywords

SC diamond; Homoepitaxy; Microwave plasma; Low-coherence interferometry; Growth rate; Etching