High density plasma chemical vapor deposition of diamond-like carbon films | Health & Environmental Research Online (HERO)

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HERO ID

6172767

Reference Type

Journal Article

Title

High density plasma chemical vapor deposition of diamond-like carbon films

Author(s)

Mousinho, AP; Mansano, RD; Massi, M; Zambom, LS

Year

2003

Is Peer Reviewed?

Journal

Microelectronics Journal
ISSN: 0959-8324

Volume

Issue

5-8

Page Numbers

627-629

DOI

Web of Science Id

WOS:000183607400072

Keywords

micromachine; tridimentional structures; polymer micromachine