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6250850 
Journal Article 
Surface treatment of tantalum to improve its corrosion resistance 
Rubinshtein, A; Shneck, R; Danon, A; Hayon, J; Nathan, S; Raveh, A 
2001 
1 
Materials Science and Engineering A: Structural Materials Properties Microstructure and Processing
ISSN: 0921-5093
EISSN: 1873-4936 
302 
1 
128-134 
WOS:000167080100021 
Tantalum was treated by radio-frequency (r.f.) plasma technique in order to improve surface properties and corrosion resistance. In this study thin layers of tantalum carbide (TaC) were produced by inductive r.f. plasma-assisted chemical vapor deposition in a gas mixture of argon, methane and hydrogen. The effect of the hydrogen and methane concentrations on the fabricated layer was studied. It was observed that hydrogen played an important role in the acceleration of the carbon diffusion into the tantalum, and it enhanced the formation of TaC phase. Increasing the methane concentration in the gas mixture did not lead to a higher carbon supply to the surface; in fact, it reduced the formation of TaC phase. The properties of the fabricated layer, such as corrosion resistance, hydrogen adsorption content, and TaC:Ta2C phase ratio, are presented and discussed. 
tantalum; radio-frequency; corrosion resistance