Couple passive voltage contrast with scanning probe microscope to identify invisible defect out | Health & Environmental Research Online (HERO)

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HERO ID

6369430

Reference Type

Journal Article

Title

Couple passive voltage contrast with scanning probe microscope to identify invisible defect out

Author(s)

Shen, CM; Chou, JH

Year

2005

Publisher

unknown

Page Numbers

290-293

DOI

Web of Science Id

WOS:000232593400063

Conference Name

12th International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2005. IPFA 2005.

Conference Location

Shangri-La's Rasa Sentosa Resort, Singapore