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6587756 
Journal Article 
TUNGSTEN ETCHING IN CF4 AND SF6 DISCHARGES 
Tang, CC; Hess, DW; , 
1984 
1 
Journal of Electrochemical Society
ISSN: 0013-4651
EISSN: 1945-7111 
ELECTROCHEMICAL SOC INC 
PENNINGTON 
131 
1 
115-120 
WOS:A1984SB16900024 
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