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HERO ID
6588485
Reference Type
Journal Article
Title
Negative ion formation in SiO2 etching using a pulsed inductively coupled plasma
Author(s)
Choi, CJ; Kwon, OS; Seol, YS; ,
Year
1998
Is Peer Reviewed?
Yes
Journal
Japanese Journal of Applied Physics
ISSN:
0021-4922
EISSN:
1347-4065
Publisher
JAPAN J APPLIED PHYSICS
Location
MINATO-KU TOKYO
Volume
37
Issue
12B
Page Numbers
6894-6898
DOI
10.1143/JJAP.37.6894
Web of Science Id
WOS:000078699200046
Abstract
The formation of negative ions in conjunction with their effect on SiO2 etching characteristics has been investigated within a CF4/Ar pulsed-power inductively coupled plasma. Electron energy distribution function in the pulsed plasma shows a narrow distribution compared with the CW mode. The average electron energy and electron density decrease greatly with decreasing duty ratio. which indicates that the high-energy electrons can be cooled effectively during afterglow time. By means of threshold ionization mass spectrometry, radical densities including CFx (x = 1 to 3) and F are measured as a function of duty ratio and also correlated with the average energy and density of electrons. For negative ions, two major peaks, F- and CF3-, are formed predominantly through the electron attachment reactions during afterglow time. The possible mechanisms for the negative ion formation are proposed in the pulsed plasma. additionally, the SiO2 etch rate decreases nearly linearly with decreasing duty ratio and microtrenching is suppressed by the reduction of charge accumulation on the sidewalls in the pulsed plasma.
Keywords
negative ion; radical; fluorocarbon; SiO2 etching; pulsed plasma; time-modulation; CF4/Ar plasma; inductively coupled plasma
Conference Name
11th International Microprocesses and Nanotechnology Conference (MNC 98)
Conference Location
KYOUHNGJU, SOUTH KOREA
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