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6591429 
Journal Article 
Permeation Properties of Single Gases (N2, O2, SF6, CF4) through PDMS and PEBAX Membranes 
Lee, S; Lee, H; Lee, S; 김한별; 이민우; 박완근 
2012 
22 
201-207 
In this study, we investigated permeation of single gas (N2, O2, CF4, and SF6) through flat sheet membrane composed of PDMS (poly-dimethylsiloxane) and PEBAX (polyether block amides). Gas permeation experiment was performed with various feed pressure. Permeability was estimated using permeation flux measured by continuous-flow technique. The permeability of gases except SF6 in PDMS were decreased with the upstream pressure increased. SF6 is much more permeable than CF4, which is due to higher critical temperature of SF6. The permeability decreased in the following order: O2 > N2 > SF6 > CF4. On the other hand,the permeability of gases in PEBAX followed the order: O2 > N2 > CF4 > SF6 which are opposite of the order of kinematic diameter (Å)(SF6 > CF4 > N2 > O2). The SF6/CF4 pure gas selectivity in PDMS was 2.1 at 0.7 MPa.