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6642963 
Journal Article 
Photogenerated base in polymer curing and imaging: Cross-linking of base-sensitive polymers containing enolizable pendant groups 
Urankar, EJ; Frechet, JMJ; , 
1997 
Yes 
Chemistry of Materials
ISSN: 0897-4756
EISSN: 1520-5002 
AMER CHEMICAL SOC 
WASHINGTON 
9 
12 
2861-2868 
English 
WOS:000071386900035 
The ability of photogenerated amine catalysts to effect the insolubilization of polymers containing acidic methylene units is explored. Cross-linking of films of poly(2-acetoacetoxyethyl methacrylate)-co-(methyl methacrylate) or poly(2-cyanoacetoxyethyl methacrylate)co-(methyl methacrylate) containing [[(2,6-dinitrobenzyl)oxy]carbonyl] cyclohexylamine as photobase generator and a bifunctional aldehyde molecule can be achieved upon exposure to deep-UV irradiation and subsequent heating. Polymers containing the cyanoacetate functionality displayed high resist sensitivities (ca. 20 mJ/cm(2)) in simple contact imaging experiments. Monitoring of the resist films using UV-vis spectroscopy suggested that crosslinking of the polymers in the presence of the aldehyde moiety proceeds via a Knoevenagel reaction. Photo-cross-linking and imaging can also be achieved in the absence of the added acceptor molecule and possible mechanisms for this insolubilization are discussed. Incorporation of the reactive cyanoacetate functionality into a phenolic polymer to provide aqueous base development is examined via the synthesis of poly[4-(2-cyanoacetoxymethyl)styrene]co-[4-hydroxystyrene].