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HERO ID
6647739
Reference Type
Journal Article
Title
DRYOX PROCESS FOR ETCHING SILICON DIOXIDE
Author(s)
Bersin, RL; Reichelderfer, RF; ,
Year
1977
Is Peer Reviewed?
0
Journal
Solid State Technology
ISSN:
0038-111X
Publisher
PENNWELL PUBL CO SOLID STATE TECHNOLOGY OFFICE
Location
NASHUA
Page Numbers
78-80
Web of Science Id
WOS:A1977DB76600004
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