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6669877 
Journal Article 
The electrochemical kinetics of silicon surface corrosion in HF containing dilute solutions 
Bertagna, V; Rouelle, F; Erre, R; Chemla, M; , 
1999 
1 
Solid State Phenomena
ISSN: 1012-0394 
TRANS TECH-SCITEC PUBLICATIONS LTD 
UETIKON A.S. 
39-42 
WOS:000078232800011 
This study was carried on to contribute to the understanding of (100) oriented silicon surfaces reactivity, when immersed in DHF solutions (dilute HF solutions). The electrochemical corrosion of silicon material was closely dependent on the species present in solution: indeed, the addition of HCl or NH4F allowed the modification of the DHF electrolyte composition inducing a change of the interacting ionic species. This project, based on electrochemical and Atomic Force Microscopy (AFM) measurements, was expected to achieve a high surface smoothness.