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6679962 
Book/Book Chapter 
Surface functionalization of silicon micropillars spin- coated with Er-doped YSO silicate nanoparticles 
Heeyoung, G; Kiseok, S; Shin, JH 
2008 
2007 Conference on Lasers and Electro Optics and the Pacific Rim Conference on Lasers and Electro-Optics 
1171-1172 
INSPEC:10020901 
Optically active and electrically excitable silicon pillar structure is fabricated by electrochemical etching method. Silicon pillars structure is made by etching porous silicon layers in hydrofluoric acid-based solution. Afterwards, silicon pillars that are spin-coated with Er silicate show strong Er-related 1.53 mum photo luminescence.