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6734373 
Journal Article 
Si-purifier: A point of use purifier for noble metals in HF baths 
Beverina, A; Tardif, F; , 
1999 
1 
Solid State Phenomena
ISSN: 1012-0394 
TRANS TECH-SCITEC PUBLICATIONS LTD 
UETIKON A.S. 
63-66 
WOS:000078232800016 
A new Point Of Use purifier was designed to eliminate noble metals (Cu, Ag, Pt, Pd, Au) from HF-based solutions. This home-made purifier uses recycled silicon substrates. It guarantees a constant bath quality throughout the bath lifetime at very low contamination levels. This Si-purifier presents a high noble metal removal capability without any limitation. Furthermore a very high saturation level is reached and it can be easily regenerated. It does not add particles to the bath and does not affect the electrical performances.