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HERO ID
6761983
Reference Type
Journal Article
Title
ETCHING OF TUNGSTEN AND TUNGSTEN SILICIDE FILMS BY CHLORINE ATOMS
Author(s)
Fischl, DS; Rodrigues, GW; Hess, DW; ,
Year
1988
Is Peer Reviewed?
1
Journal
Journal of Electrochemical Society
ISSN:
0013-4651
EISSN:
1945-7111
Publisher
ELECTROCHEMICAL SOC INC
Location
PENNINGTON
Page Numbers
2016-2019
Web of Science Id
WOS:A1988P675200030
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