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6765239 
Journal Article 
Electrochemical impedance spectroscopic characterization of hydrophobic coatings deposited onto pre-oxidized silicon 
Almanza-Workman, AM; Raghavan, S; Deymier, P; Petrovic, S; Monk, DJ; Roop, R; , 
2003 
TRANS TECH PUBLICATIONS LTD 
ZURICH-UETIKON 
211-214 
WOS:000183458700051 
Water-dispersible organosilanes have been used to apply highly hydrophobic coatings onto pre-oxidized silicon with the ultimate goal of using this technique to prevent or reduce release as well as in-use stiction in micro-electromechanical structures. The ability of the hydrophobic films to provide a barrier to liquid penetration has been investigated by electrochemical impedance spectroscopy in hydrofluoric acid (HF) solutions. The results have been analyzed using equivalent circuits. 
3-908450-78-0 
5th International Symposium on Ultra Clean Processing of Silicon Surfaces 
OOSTENDE, BELGIUM