Formation and micromachining of Teflon (fluorocarbon polymer) film by a completely dry process using synchrotron radiation | Health & Environmental Research Online (HERO)

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HERO ID

7030249

Reference Type

Journal Article

Title

Formation and micromachining of Teflon (fluorocarbon polymer) film by a completely dry process using synchrotron radiation

Author(s)

Inayoshi, M; Ito, M; Hori, M; Goto, T; Hiramatsu, M; ,

Year

1999

Is Peer Reviewed?

Journal

Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures
ISSN: 1071-1023

Publisher

AMER INST PHYSICS

Location

WOODBURY

Page Numbers

949-956

Web of Science Id

WOS:000080853100008

Abstract

The development of a new fabrication technique of Teflon microparts using synchrotron radiation (SR) irradiation, the SR ablation process, was described. The anisotropic micromachining and thin film formation of polytetrafluoroethylene, fluorinated ethylene propylene, and perfluoroalkoxy were demonstrated using the SR ablation process. The anisotropic micromachining of Teflon with hole pattern of 2 mu m diam was successfully performed, and the micromachining of Teflon with a high aspect ratio of 50 was achieved. Moreover, Teflon films with flat surface were formed at a high rate by the SR ablation of Teflon at the substrate temperature above 200 degrees C. (C) 1999 American Vacuum Society.