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7147628 
Journal Article 
0.5(BaZr0.2Tio. 03)-0.5(13a0.7Ca0.303) thin deriving from green sol-gel routes 
Barbato, PS; Aprea, P; Caputo, D; Casuscelli, V; Scaldaferri, R; di Matteo, A; , 
2019 
IEEE 
NEW YORK 
139-141 
Lead-free piezoelectric thin films made of 0.5(BaZr0.2Tio s03)-0.5(Bao7Cao303) over Pt/TiOJSiOz/Si !sere synthesized by means of repeated "green" chemical solution deposition routes with the use of non-toxic solvents. Characterization results of the morphology and ferroelectric behavior of the films are reported. 
8th IEEE International Workshop on Advances in Sensors and Interfaces (IWASI) 
Otranto, ITALY