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HERO ID
7147628
Reference Type
Journal Article
Title
0.5(BaZr0.2Tio. 03)-0.5(13a0.7Ca0.303) thin deriving from green sol-gel routes
Author(s)
Barbato, PS; Aprea, P; Caputo, D; Casuscelli, V; Scaldaferri, R; di Matteo, A; ,
Year
2019
Publisher
IEEE
Location
NEW YORK
Page Numbers
139-141
Web of Science Id
WOS:000502733100031
Abstract
Lead-free piezoelectric thin films made of 0.5(BaZr0.2Tio s03)-0.5(Bao7Cao303) over Pt/TiOJSiOz/Si !sere synthesized by means of repeated "green" chemical solution deposition routes with the use of non-toxic solvents. Characterization results of the morphology and ferroelectric behavior of the films are reported.
Conference Name
8th IEEE International Workshop on Advances in Sensors and Interfaces (IWASI)
Conference Location
Otranto, ITALY
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