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7747793 
Journal Article 
Study on the Anodic Bonding Mechanism of Polymer Electrolyte and Aluminum Based on MEMS Sensor Package 
Yin, Xu; Liu, C; Meng, YY; Zhang, L 
2020 
Yes 
Journal of Inorganic and Organometallic Polymers and Materials
ISSN: 1574-1443
EISSN: 1574-1451 
Springer 
DORDRECHT 
30 
8 
3055-3059 
English 
WOS:000515935000002 
In this paper, Polyethylene oxide (PEO) is used as the main material to prepare PEO–LiClO4, a polymer electrolyte packaging material. The complexation mechanism of PEO–LiClO4 was studied by fourier transform infrared (FT-IR) spectra. Finally, the bonding of PEO–LiClO4 with Al was completed by anodic bonding method. Secondly, the bonding mechanism of PEO–LiClO4 and Al was revealed by FT-IR and energy dispersive spectrum analysis. The results show that in a certain range, the more lithium salt content, the more Li+ number of ether oxygen coordination in the molecular chain of LiClO4 and PEO, the higher the degree of complexation; under the action of strong electrostatic field, the ion-coordination exchange of PEO–LiClO4 and Al at the bonding interface by ion diffusion is the direct reason for the two to achieve bonding. © 2020, Springer Science+Business Media, LLC, part of Springer Nature. 
MEMS packaging; Anodic bonding; Polymer electrolyte; Mechanism