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8118629 
Journal Article 
Low temperature plasma enhanced deposition of GaP films on Si substrate 
Gudovskikh, AS; Morozov, IA; Uvarov, AV; Kudryashov, DA; Nikitina, EV; Bukatin, AS; Nevedomskiy, VN; Kleider, JP 
2018 
1 
Journal of Vacuum Science and Technology A
ISSN: 0734-2101
EISSN: 1520-8559 
36 
2 
WOS:000426978500019