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8197680 
Journal Article 
DETECTION OF VOLATILE ORGANIC COMPOUNDS USING MEMS BASED MICROCANTILEVER: A REVIEW 
Prakash, CJ; Siddaiah, N 
2021 
16 
1 
67-75 
English 
This survey presents a literature review of metal oxide-based volatile organic compounds (VOC) sensor detection and cantilever based sensors for the checking and recognition of unpredictable natural mixes. The study contains data gave by various partners and writing concentrated on recognition of VOC gases like n-octane, toluene & n-butanone, Ethanol, Acetone, Pentaerythritol, tetra nitrate& 2,4,6-Trinitrotoluene with sensitivities, the limit of detection was presented. Parameters like resonant frequencies, quality factor and deflection properties of length versus width are measured for different MEMS cantilever structures. © 2021. Asian Research Publishing Network (ARPN). All Rights Reserved. 
benzene; cantilever; toluene; volatile organic compounds