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1324929 
Journal Article 
All-Solid-State Lithium-Ion Microbatteries: A Review of Various Three-Dimensional Concepts 
Oudenhoven, JosFM; Baggetto, L; Notten, PHL 
2011 
1 
1 
10-33 
WOS:000291725000002 
With the increasing importance of wireless microelectronic
devices the need for on-board power supplies is evidently also increasing. Possible candidates
for microenergy storage devices are planar all-solid-state Li-ion microbatteries, which are
currently under development by several start-up companies. However, to increase the energy
density of these microbatteries further and to ensure a high power delivery, three-dimensional
(3D) designs are essential. Therefore, several concepts have been proposed for the design of 3D
microbatteries and these are reviewed. In addition, an overview is given of the various electrode
and electrolyte materials that are suitable for 3D all-solid-state microbatteries. Furthermore,
methods are presented to produce films of these materials on a nano- and microscale.