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2183160 
Journal Article 
Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range 
Sandner, T; Schmidt, JU; Schenk, H; Lakner, H; Gatto, A; Yang, M; Kaiser, N; Braun, S; Foltyn, T; Leson, A 
2005 
Unk 
Proceedings of SPIE
ISSN: 0277-786X
EISSN: 1996-756X 
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) 
5721 
72-80 
WOS:000228764100011 
High reflecting low-stress optical coatings for the next-generation of micro mechanical mirrors have been developed. The optimized metal systems are applicable from VUV and DUV down to the UV and VIS spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors. This optimized metal designs enable to reconcile high optical performances with adequate mechanical properties and convenient CMOS compatibility. Currently, micro-mirror arrays with enhanced highly reflective coatings for DUV (lambda = 193 nm) and VUV (lambda = 157 nm) exist as prototypes. 
MOEMS; enhanced aluminum; highly reflective coating; DUV; mask-less lithography; PCB printing 
IRIS
• PCBs
     Litsearches
          Initial Filter
               Non Peer-Reviewed
          LitSearch August 2015
               WoS