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HERO ID
5933753
Reference Type
Journal Article
Title
Quartz crystal microbalance for silicon surface organic contamination
Author(s)
Habuka, H; Suzuki, K; Okamura, S; Shimada, M; Okuyama, K
Year
2005
Is Peer Reviewed?
1
Journal
Journal of Electrochemical Society
ISSN:
0013-4651
EISSN:
1945-7111
Publisher
ELECTROCHEMICAL SOC INC
Location
PENNINGTON
Volume
152
Issue
4
Page Numbers
G241-G245
Language
English
DOI
10.1149/1.1864472
Web of Science Id
WOS:000228521200054
Abstract
A quartz crystal microbalance (QCM) was used to develop a real-time measurement method of airborne organic contamination on a silicon surface. At the relative humidity of 40-50%, the amount of adsorbed water on the silicon surface was determined to be several tens to 100 ng cm(-2). Under this condition, the adsorption and desorption of diethyl phthalate can be measured at the time corresponding to the operations of the diethyl phthalate vapor supply. Its adsorption rate and desorption rate are consistent with those evaluated in a clean room. Based on the weight evaluation of various contaminations, the significant part of the change in the surface concentration obtained by the QCM method in a clean room can be assigned to airborne organic contamination. (c) 2005 The Electrochemical Society. All rights reserved.
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IRIS
•
Diethyl phthalate (DEP)
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Jan 2020 update
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Excluded: No Primary Data on Health Effects
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